        
|
|
|
MUEGGE is solution provider in the field of industrial heating and plasma technology, thinking in systems as well as in components. MUEGGE's STP2020 tool based on the Remote Plasma Source generating high amount of rapid reactive radicals shows extremely high etching rates of e.g. SU-8 resist with high selectivity at extremely low thermal load for production of MEMS in the LiGA process.
|
